@@Next Meeting

‘ Announcement on the 24st Committee Meeting ‘
‘ Date ‘
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@Date: February 27th, 2002 (Wed)
@General Assembly/Special Lectures 1:00PM - 5:00PM "Fukuju" on 7th Floor
@Reception 5:15PM - 7:00PM "Karin" on 6th Floor
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‘ Place ‘
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@"You-pouto"
@8-4-13 Nishi-Gotanda, Shinagawa-ku, Tokyo
@Tel: 03-3490-5111 (5 minutes walk from JR Gotanda station of West Exit)
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‘ Schedule ‘
‘1. the General Meeting of the year 2002 1:00PM - 2:00PM
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@(1) the Summery of the year 2001
@@@- Report of Activities
@@@- Accounting/Auditing Report
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@(2) On activities of the year 2002
@@@- the Guideline of Activities
@@@- the Budget Plan
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@(3) Others
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ŸŸŸ Coffee Break 2:00PM - 2:15PM ŸŸŸ
‘2. Special Lecture 2:15PM - 5:00PM
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2:15PM - 3:05PM (50min including Q&A)
@(1) "VLSI Devices and Its Future Outlook -Expectations onPlanarization CMP- "
@@@Jun-ichi Nishizawa, the President of Iwate Prefectural University


3:05PM - 3:55PM (50min including Q&A)
@(2) "Development of an Integrated Model of Chemical Mechanical Planarization"
@@@David A. Dornfeld Ph.D, University of California, Berkeley


3:55PM - 4:45PM (50min including Q&A)
@(3) "Carbon Nano-tube and Its Application to LSI -the Necessity of CMP- "
@@@Katsunobu Aoyanagi, Professor at the Interdisciplinary Graduate School of
@@@Science and Engineering, Tokyo Institute of Technology

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‘3. Explanation on Materials of Regular Session
@@(Counselor : Dr.Matsunaga)4:45PM - 4:55PM
‘4. Other
‘Reception 5:15PM - 7:00PM
Contact Us
Please be advised to contact us beforehand if you would like to attend the meeting.

Contact: 2-7-15 Kiba, Koto-ku, Tokyo, Dai-ichi Building 5th Floor
Tel :03-5639-1510
Fax:03-5639-1513
E-mail: inquiry@planarization-cmp.org

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